Semiconductor vibration detection device with lever structure

Details Semiconductor vibration detection device with lever structure Semiconductor vibration detection device with lever structure

1984-08-31

1986-02-18

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

357 26, H01G 700, H01L 2984

Patent

active

045716617

ABSTRACT:
A semiconductor vibration detection device according to the present invention includes a movable lever which is supported by the semiconductor base with at least one of its ends and includes a vibrating part that extends, with an incorporated electrode, approximately parallel to the semiconductor base, and a fixed electrode layer which is provided on the semiconductor base opposite to the movable lever. The movable lever has a triple layer structure in which the middle section is a polysilicon layer that is formed to be alkali-etching-proof and a top and a bottom layers that are sandwiching the middle layer are also of alkali-etching-proof.

REFERENCES:
patent: 3761784 (1973-09-01), Jund
I.B.M. Technical Disclosure Bulletin, vol. 9, No. 11, Apr. 1967, p. 1651.
International Electron Devices Meeting Technical Digest Washington, D.C., Dec. 7, 1980, pp. 673-675.
Micromechanical Accelerometer Integrated with MOS Detection Circuitry, Petersen et al.

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