Silicon-glass-silicon capacitive pressure transducer

Details Silicon-glass-silicon capacitive pressure transducer Silicon-glass-silicon capacitive pressure transducer

1981-10-13

1983-09-20

Goldberg, Elliot A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73718, 73724, H01G 700

Patent

active

044059701

ABSTRACT:
A silicon capacitive pressure transducer 34 comprising two wafers of silicon 14, 32 separated by borosilicate glass 18, 21, one of the wafers 14 having a borosilicate glass pedestal 26 thereon which is metallized 30 to provide one plate of a capacitor, the other plate of which is the surface of one of the silicon wafers 32. The distance between the upper surface of the glass pedestal and the lower surface of the silicon wafer is defined by a portion 18 of the borosilicate glass, the portion 21 of borosilicate glass being the same height as that of the glass pedestal 26. An embodiment of a transducer 34b employs a silicon pedestal 26b, wherein the glass portion 21b only provides separation of the silicon wafers 14b, 32b with lower parasitic capacitance.

REFERENCES:
patent: 3634727 (1972-01-01), Polye
patent: 3965746 (1976-06-01), Rabok
patent: 4168517 (1979-09-01), Lee
patent: 4287553 (1981-09-01), Braunlich

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