Silicon capacitive pressure sensor having a glass dielectric dep

Details Silicon capacitive pressure sensor having a glass dielectric dep Silicon capacitive pressure sensor having a glass dielectric dep

1993-12-02

1994-12-20

Reynolds, Bruce A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

73517R, H01G 700

Patent

active

053750349

ABSTRACT:
A silicon capacitive pressure sensor is disclosed having a silicon diaphragm and a silicon substrate arranged in parallel and separated by a glass dielectric spacer. The glass is deposited onto a surface of the substrate using an ion milling machine. The sensor further includes a transition piece attached to a second layer of glass insulator disposed between the silicon diaphragm and the transition piece. The transition piece has a throughbore formed therein for applying a fluid to a surface of the silicon diaphragm, the fluid having a pressure desired to be measured by the sensor. The glass disposed between the diaphragm and the transition piece is deposited onto the transition piece using the ion milling process.

REFERENCES:
patent: 4405970 (1983-09-01), Swindal et al.
patent: 4415948 (1983-11-01), Grantham et al.
patent: 4467394 (1984-08-01), Grantham et al.
patent: 4513348 (1985-04-01), Grantham
patent: 4517622 (1985-05-01), Male
patent: 4530029 (1985-07-01), Beristain
patent: 4743836 (1988-05-01), Grzybowski et al.
patent: 4792501 (1988-12-01), Allred
patent: 4879627 (1989-11-01), Grantham
patent: 4883768 (1989-11-01), Swindal et al.
patent: 4951174 (1990-08-01), Grantham et al.
patent: 4954925 (1990-09-01), Bullis et al.
patent: 5008774 (1991-04-01), Bullis

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