Sensor detector element for an electrical hygrometer

Details Sensor detector element for an electrical hygrometer Sensor detector element for an electrical hygrometer

1980-05-28

1982-08-31

Goldberg, Elliot A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

733365, 219209, 361322, H01G 700

Patent

active

043475507

ABSTRACT:
A strictly capacitive sensor for an electrical hygrometer comprises an electrode in the form of a slice of doped silicon supporting a dielectric layer of hygroscopic material which in turn supports a further and permeable electrode, while the surface of the silicon which supports the dielectric layer is oxidized to provide an impermeable barrier layer which prevents the sensor acting resistively.

REFERENCES:
patent: 3220880 (1965-11-01), Ieversanger
patent: 4143177 (1979-03-01), Kovac et al.
Channon, "A Thick Film Humidity Sensor", Conf. on Hybrid Microelectronics, Loughborough, Leics, England, 9/75.

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