Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1989-03-07
1990-02-13
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
315 58, H01G 700, H01J 744
Patent
active
049011979
ABSTRACT:
The invention is directed to a sensor for making capacitive measurements of the pressure in gases and contains two measuring electrodes conjointly defining a capacitor and arranged in spaced relationship to each other. This sensor is improved such that a pressure measurement is possible without deformable parts. Long-term drift free measurements can be carried out with even the smallest electrode spacing being realized so that miniature sensors can be provided. The intermediate space between the electrodes is accessible to the gas to be investigated and has electrically insulating spacers between the electrodes. The spacers determine the spacing between the electrodes and maintains the electrode spacing during the measurement.
REFERENCES:
patent: 2725501 (1955-11-01), Sihvonen
patent: 4287553 (1981-09-01), Braunlich
patent: 4735098 (1988-04-01), Kavli et al.
Albarda Scato
Lagois Johannes
Otten Johann
Thoren Werner
Dragerwerk Aktiengesellschaft
Griffin Donald A.
Ottesen Walter
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