Electricity: electrical systems and devices – Electrostatic capacitors – Variable
Patent
1990-05-21
1992-03-10
Griffin, Donald A.
Electricity: electrical systems and devices
Electrostatic capacitors
Variable
357 26, 357 51, 437 51, H01G 700, H01L 2702, H01L 2984, H01L 2170
Patent
active
050954016
ABSTRACT:
The present invention relates to the fabrication of diaphragm pressure sensors utilizing silicon-on-insulator technology where recrystallized silicon forms a diaphragm which incorporates electronic devices used in monitoring pressure. The diaphragm is alternatively comprised of a silicon nitride having the necessary mechanical properties with a recrystallized silicon layer positioned thereon to provide sensor electronics.
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Morrison, Jr. Richard H.
Zavracky Paul M.
Griffin Donald A.
Kopin Corporation
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