SOI diaphragm sensor

Details SOI diaphragm sensor SOI diaphragm sensor

1990-05-21

1992-03-10

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

357 26, 357 51, 437 51, H01G 700, H01L 2702, H01L 2984, H01L 2170

Patent

active

050954016

ABSTRACT:
The present invention relates to the fabrication of diaphragm pressure sensors utilizing silicon-on-insulator technology where recrystallized silicon forms a diaphragm which incorporates electronic devices used in monitoring pressure. The diaphragm is alternatively comprised of a silicon nitride having the necessary mechanical properties with a recrystallized silicon layer positioned thereon to provide sensor electronics.

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