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Method and apparatus for releasing a workpiece from and electros

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for safely dechucking wafers

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for securely dechucking wafers

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for supplying a chucking voltage to an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for the grounding of process wafers by...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and apparatus for the use of diamond films as dielectric

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent

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Method and apparatus for thermal control of a semiconductor...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and device for electrostatic fixing of substrates...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and device for polarizing ferroelectric materials

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and structure for improving gas breakdown resistance and

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and structure for improving gas breakdown resistance and

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method and system for flattening a reticle within a...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for dechucking a workpiece from an electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for energy extraction—II

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for energy extraction-I

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for fabricating a Johnsen-Rahbek electrostatic wafer...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for fabricating a Johnsen-Rahbek electrostatic wafer...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for forming an ion implanted electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for rapidly dechucking a semiconductor wafer from an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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Method for reducing particles from an electrostatic chuck...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
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