Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Patent
1998-12-03
2000-09-05
Leja, Ronald W.
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
279128, 428195, H02N 1300
Patent
active
061152323
ABSTRACT:
The present invention provides a method for forming an electrostatic chuck. A chuck body is provided in which the chuck body includes an insulating layer. Metal is implanted into a surface of the chuck body, wherein a conductive layer of metal is formed within the insulating layer of the chuck body.
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Hass Crystal J.
Kelleher Patrick J.
Leja Ronald W.
LSI Logic Corporation
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