Method for forming an ion implanted electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

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279128, 428195, H02N 1300

Patent

active

061152323

ABSTRACT:
The present invention provides a method for forming an electrostatic chuck. A chuck body is provided in which the chuck body includes an insulating layer. Metal is implanted into a surface of the chuck body, wherein a conductive layer of metal is formed within the insulating layer of the chuck body.

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