Method for dechucking a workpiece from an electrostatic chuck

Details Method for dechucking a workpiece from an electrostatic chuck Method for dechucking a workpiece from an electrostatic chuck

1995-06-07

1997-11-04

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

056846690

ABSTRACT:
A method of dechucking a workpiece from an electrostatic chuck. The method adaptively produces a dechucking voltage for canceling any unpredictable residual electrostatic fields between a workpiece and the electrostatic chuck. The method contains the steps of (a) applying a lifting force to the workpiece; (b) altering the chucking voltage; (c) measuring the lifting force; (d) comparing the measured lifting force to a threshold level; and, depending on the result of the comparison, either (e) maintaining the chucking voltage at its present level for a predefined period of time and physically dechucking the workpiece or (f) repeating steps (b), (c), (d) and (e).

REFERENCES:
patent: 4667110 (1987-05-01), Kariya
patent: 5117121 (1992-05-01), Watanabe et al.
patent: 5221450 (1993-06-01), Hattori et al.
patent: 5325261 (1994-06-01), Horwitz
patent: 5350479 (1994-09-01), Collins et al.
patent: 5444597 (1995-08-01), Blake et al.
patent: 5459632 (1995-10-01), Birang et al.
patent: 5491603 (1996-02-01), Birang et al.

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