LandOfFree - US Patents - Listing for Electricity: electrical systems and devices,Electric charge generating or conducting means,Use of forces of electric charge or field

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for chucking a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for clamping a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for compensating non-uniform wafer...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for conditioning an electrostatic chuck

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for controlling chucking force in an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for controlling temperature of a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for dechucking a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for dechucking a substrate

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for dechucking a substrate from an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for dechucking a workpiece from an...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for determining wafer warpage for optimized

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for energy extraction

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for implanting a charge in an electret foil

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for improved retention of a semiconductor w

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for minimizing plasma destabilization...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for operating an electrostatic chuck in...

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for optimizing a dechucking period used to

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for predicting failure of an eletrostatic c

Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field

Method and apparatus for providing an electrostatic chuck...