Method and apparatus for predicting failure of an eletrostatic c

Details Method and apparatus for predicting failure of an eletrostatic c Method and apparatus for predicting failure of an eletrostatic c

1998-03-17

1999-03-23

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

361233, 279128, H02N 1300

Patent

active

058868658

ABSTRACT:
A method and apparatus for determining the state of contamination of an electrostatic chuck. The method consists of applying a voltage to at least one of the chuck electrodes and measuring a leakage current to any of the chuck electrodes. The measured current is compared to a first threshold value. If the measured current is greater than the first threshold value, the chuck is deemed contaminated.

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