Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2005-05-24
2005-05-24
Niebling, John F. (Department: 2812)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
Reexamination Certificate
active
06898065
ABSTRACT:
A method and apparatus for a mixed-mode operation of an electrostatic chuck in a semiconductor substrate processing system. The chuck is operated in a voltage mode before and after a processing and is operated in a current mode during the processing to suppress arcing during the processing of a substrate.
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Ishikawa Tetsuya
Mays Brad
Shoji Sergio Fukuda
Bach Joseph
Moser Patterson & Sheridan LLP
Niebling John F.
Stevenson Andre′
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