High power electrostatic chuck contact

Details High power electrostatic chuck contact High power electrostatic chuck contact

1996-06-28

1998-08-25

Fleming, Fritz

Electricity: electrical systems and devices

Electric charge generating or conducting means

Use of forces of electric charge or field

H02N 1300

Patent

active

057989044

ABSTRACT:
In a vacuum processing chamber, an exemplary electrical contact assembly between an electrostatic chuck and a voltage source comprises a flexible wire connected at one end to the underside of the electrostatic chuck and at the other end to a conductive socket fixed in the electrode cap. An electrical contacting member which is connected to the voltage source is removably received into the socket so that the electrode cap can be replaced by lifting the electrode cap and socket off of the contacting member which is fixed in the electrode base.

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patent: 5200232 (1993-04-01), Tappan et al.
patent: 5262029 (1993-11-01), Erskine et al.
patent: 5326725 (1994-07-01), Sherstinsky et al.

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