Electricity: electrical systems and devices – Electric charge generating or conducting means – Use of forces of electric charge or field
Reexamination Certificate
2004-06-03
2008-08-19
Nguyen, Dao H (Department: 2818)
Electricity: electrical systems and devices
Electric charge generating or conducting means
Use of forces of electric charge or field
C361S115000, C118S725000, C118S728000, C257S648000, C257S703000
Reexamination Certificate
active
07414823
ABSTRACT:
Affords a holder for use in semiconductor or liquid-crystal manufacturing devices—as well as semiconductor or liquid-crystal manufacturing devices in which the holder is installed—in which temperature uniformity in the processed-object retaining face is heightened. Configuring the holder with, furnished atop a ceramic susceptor, a composite of a ceramic and a metal improves the temperature uniformity in the holder's processed-object retaining face and makes for curtailing the generation of particulates and other contaminants. In addition, putting a coating on at least the retaining face improves the durability of the holder. Installing a holder of this sort in a semiconductor manufacturing device or a liquid-crystal manufacturing device contributes to making available semiconductor or liquid-crystal manufacturing devices whose productivity and throughput are excellent.
REFERENCES:
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patent: 6508884 (2003-01-01), Kuibira et al.
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Merriam-Webster's Collegiate Dictionary, tenth edition, p. 236.
Hashikura Manabu
Kuibira Akira
Nakata Hirohiko
Natsuhara Masuhiro
Judge James W.
Nguyen Dao H
Sumitomo Electric Industries Ltd.
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