Microelectricalmechanical system (MEMS) electrical isolator...
Microelectromechanical apparatus for elevating and tilting a...
Microelectromechanical apparatus for elevating and tilting a...
Microelectromechanical ratcheting apparatus
Microelectromechanical system actuator for extended linear...
Microelectromechanical system for tilting a platform
Microelectromechanical system with stiff coupling
Microelectromechanical transducer and fabrication method
Microelectromechnical system for tilting a platform
Microelectromechnical system for tilting a platform
Microfabricated microengine for use as a mechanical drive and po
Microfabricated rotary motion wobble motor and disk drive incorp
Microfabricated torsional drive utilizing lateral...
Microfabricated vertical comb actuator using plastic...
Microfabricated vertical comb actuator using plastic...
Micromachine
Micromachine and method of fabricating the same
Micromachined moving device controlled by a...
Micromachined ultrasonic spiral arrays for medical...
Micromachined ultrasonic transducer cells having compliant...