Energy transfer microwave plasma source
Enhanced electron emissive surfaces for a thin film...
Extended ion sources and method for using them in an insulation
External plasma gun
External resonance circuit type radio frequency quadrupole accel
Extreme UV radiation source and semiconductor exposure device
Fast atomic beam source with an inductively coupled plasma gener
Filament dispenser cathode
Flexible ion emitter
Floating mode ion source
Focus ring arrangement for substantially eliminating unconfined
Formation of a field reversed configuration for magnetic and...
Formation of a field reversed configuration for magnetic and...
Formation of a field reversed configuration for magnetic and...
Formation of a field reversed configuration for magnetic and...
Four-electrode ion source
Four-nozzle plasma generator for forming an activated jet
Fused metal ion source with sintered metal head
Gas discharge electron gun for generating an electron beam by me
Gas distribution plate electrode for a plasma reactor