Four-electrode ion source

Details Four-electrode ion source Four-electrode ion source

1988-06-10

1990-07-03

LaRoche, Eugene R.

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Plasma generating

31511181, 31323141, 3133621, 250426, H01J 2900, H01J 1726

Patent

active

049394258

ABSTRACT:
A vacuum arc ion source comprises an anode (2 or 3) and a cathode (1) which face each other and whose plasma (7) is emitted perpendicularly to the cathode surface. The projection of this plasma is obtained by means of two independent appropriately biased grids (4 and 5).

REFERENCES:
patent: 3097321 (1963-07-01), Row, Jr. et al.
patent: 3356897 (1967-12-01), Barr, Jr. et al.

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