Floating mode ion source

Details Floating mode ion source Floating mode ion source

2006-01-17

2006-01-17

Wells, Nikita (Department: 2881)

Electric lamp and discharge devices: systems

Discharge device load with fluent material supply to the...

Electron or ion source

C250S42300F, C250S426000, C315S111910, C315S111010, C313S231410, C313S231010

Reexamination Certificate

active

06987364

ABSTRACT:
A cold-cathode closed-drift ion source includes an anode, a cathode and a power supply. In certain example embodiments, neither the positive nor negative terminals of the power supply are connected to ground, and the anode and cathode are also not connected to ground. Thus, the ion source operates in a floating mode. As a result, the likelihood of formation of a problematic secondary circuit from the source to the power supply through the walls can be reduced and/or eliminated (or suppressed). Therefore, the chance of drawing a net positive charge from the ion source which induces a positive charge on dielectric or other surfaces proximate the wall(s) can be suppressed and/or reduced.

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U.S. Appl. No. 60/499,342 filed Sep. 3, 2003.

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