Filament dispenser cathode

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source

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Details

250423R, 313146, 315357, H01J 304, H01J 2726

Patent

active

043885608

ABSTRACT:
Thermionic cathode 12 for a plasma ion source 10 has tungsten wire 64 advanced by wheels 56 from supply 50 to take-up spool 58. In chamber 48, the active cathode region 64 acts with anode 16 to supply electrons for ionizing a fuel gas so the ions are discharged from slit 18 for acceleration, separation and implantation.

REFERENCES:
patent: 3290540 (1966-12-01), Atti

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