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Wafer flattening system

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Wafer for carrying semiconductor wafers and method detecting waf

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer handling device

Coating apparatus – Work holders – or handling devices – Gripper or clamped work type
Reexamination Certificate

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Wafer handling within a vacuum chamber using vacuum

Coating apparatus – Gas or vapor deposition – Having means to expose a portion of a substrate to coating...
Patent

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Wafer holder for semiconductor manufacturing apparatus and...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Wafer holder for semiconductor manufacturing apparatus,...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Wafer holder method and apparatus in a vacuum deposition system

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Wafer holder with peripheral lift ring

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer holder with peripheral lift ring

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Wafer holder with stiffening rib

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Wafer holding apparatus

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Wafer holding, wafer support member, wafer boat and heat...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Wafer load/unload apparatus for E-Gun evaporation process

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Wafer orientation alignment system

Coating apparatus – Gas or vapor deposition
Patent

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Wafer out-of-pocket detector and susceptor leveling tool

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Wafer pedestal with a purge ring

Coating apparatus – Gas or vapor deposition
Patent

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Wafer process tube apparatus and method for vertical furnaces

Coating apparatus – Gas or vapor deposition
Patent

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Wafer processing apparatus having independently controllable ene

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Wafer processing architecture including load locks

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Wafer processing cluster tool batch preheating and degassing app

Coating apparatus – Gas or vapor deposition – Multizone chamber
Patent

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