Wafer flattening system

Wafer for carrying semiconductor wafers and method detecting waf

Wafer handling device

Wafer handling within a vacuum chamber using vacuum

Wafer holder for semiconductor manufacturing apparatus and...

Wafer holder for semiconductor manufacturing apparatus,...

Wafer holder method and apparatus in a vacuum deposition system

Wafer holder with peripheral lift ring

Wafer holder with peripheral lift ring

Wafer holder with stiffening rib

Wafer holding apparatus

Wafer holding, wafer support member, wafer boat and heat...

Wafer load/unload apparatus for E-Gun evaporation process

Wafer orientation alignment system

Wafer out-of-pocket detector and susceptor leveling tool

Wafer pedestal with a purge ring

Wafer process tube apparatus and method for vertical furnaces

Wafer processing apparatus having independently controllable ene

Wafer processing architecture including load locks

Wafer processing cluster tool batch preheating and degassing app