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Branching RF antennas and plasma processing apparatus

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Buffer chamber for integrating physical and chemical vapor...

Coating apparatus – Gas or vapor deposition – Multizone chamber
Reexamination Certificate

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Bypass gas feed system and method to improve reactant gas...

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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