4. Coating apparatus
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Welded susceptor assembly

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Width adjustable substrate support for plasma processing

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Workpiece support

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Workpiece support platen for semiconductor process chamber

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Workpiece support system and method

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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Workpiece support with fluid zones for temperature control

Coating apparatus – Gas or vapor deposition – Work support
Reexamination Certificate

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