Workpiece support with fluid zones for temperature control

Details Workpiece support with fluid zones for temperature control Workpiece support with fluid zones for temperature control

2011-07-05

2011-07-05

Gramaglia, Maureen (Department: 1716)

Coating apparatus

Gas or vapor deposition

Work support

C118S724000, C156S345510, C156S345520, C156S345530

Reexamination Certificate

active

07972444

ABSTRACT:
A workpiece support is disclosed defining a workpiece-receiving surface. The workpiece support includes a plurality of fluid zones. A fluid, such as a gas, is fed to the fluid zones for contact with a workpiece on the workpiece support. The fluid can have selected thermoconductivity characteristics for controlling the temperature of the workpiece at particular locations. In accordance with the present disclosure, at least certain of the fluid zones are at different azimuthal positions. In this manner, the temperature of the workpiece can be adjusted not only in a radial direction but also in an angular direction.

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PCT International Search Report for PCT /US2008/081923, dated Jul. 7, 2009.

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