Welded susceptor assembly

Coating apparatus – Gas or vapor deposition – Work support

Patent

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Details

118500, 118723E, C23C 1600

Patent

active

055229379

ABSTRACT:
A susceptor support arm assembly in a substrate processing chamber includes a secure ground connection between the susceptor and ground. An aluminum wire rope is welded to a winged terminal lug which is tightly inserted into a hole in a susceptor hub. The wings of the lug are then welded to the hub. The wire rope, now permanently attached to the susceptor hub, is routed through an opening in the susceptor end of a ceramic susceptor support arm, able to pass the ground end lug of the wire rope, through a channel in the support arm back to the susceptor arm support device, and to ground. The channel in the susceptor arm has grooves in its sides to receive a paddle shaped ceramic cover to enclose the channel and the bottom of the hub end of the susceptor arm. The cover insulates, isolates, and shields the grounding wire and thermocouple leads being routed from the susceptor hub back to the support end of the susceptor arm from exposure to the high intensity radiant energy directed at the back of the susceptor. Conical spring washers and shoulder screws, attach the metallic pieces (e.g. the susceptor hub) to the ceramic susceptor hub arm allowing for the differential thermal expansion between pieces without overstressing the ceramic material clamped. Surface treatment of the metallic pieces enhances their corrosion resistance.

REFERENCES:
patent: 3622943 (1971-11-01), Reimer
patent: 3642457 (1972-02-01), Brill-Edwards
patent: 4028064 (1977-06-01), Cassidy
patent: 4103725 (1978-08-01), Abe
patent: 4178877 (1979-12-01), Kudo
patent: 4302136 (1981-11-01), Abe
patent: 5019233 (1991-05-01), Blake
patent: 5235136 (1993-08-01), Santucci
patent: 5359143 (1994-10-01), Simon

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