External isolation module

Details External isolation module External isolation module

1983-06-23

1984-11-06

Smith, John D.

Coating apparatus

Gas or vapor deposition

Multizone chamber

118718, 118733, 118900, 277DIG7, C23C 1310

Patent

active

044805853

ABSTRACT:
An external isolation module adapted to operatively interconnect at least one pair of a plurality of adjacent vacuum chambers through which a substrate travels and into which reaction materials are introduced. The external isolation module provides a passageway for the substrate between adjacent chambers while substantially preventing the diffusion of reaction materials from one of the chambers into the adjacent chamber. An accessible, environmentally-sealed, reaction material-isolating passageway is thereby formed.

REFERENCES:
patent: 2887984 (1959-05-01), Drummond
patent: 2975753 (1961-03-01), Hayes
patent: 3294670 (1966-12-01), Charschan et al.
patent: 4048955 (1977-09-01), Anderson
patent: 4065137 (1977-12-01), Rueggeberg et al.
patent: 4268977 (1981-05-01), Geiger

Affiliated with

Also associated with

Rating

External isolation module does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with External isolation module, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and External isolation module will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1037794