Managing work-piece deflection

Details Managing work-piece deflection Managing work-piece deflection

2005-08-23

2005-08-23

Mills, Gregory (Department: 1763)

Coating apparatus

Gas or vapor deposition

Chamber seal

C118S728000, C118S725000, C118S724000, C118S729000, C156S345510, C156S345520, C156S345530, C156S345540, C384S134000, C277S345000

Reexamination Certificate

active

06932873

ABSTRACT:
A work-piece deflection management system including: (a) a first and a second vacuum chambers, each said vacuum chamber having an air-bearing seal circumscribing one of its sides, and (b) a work-piece plate; wherein the air-bearing seals are aligned to face one-another with the work-piece plate respectively there-between, allowing the work-piece to be laterally slid with respect to the air-bearing seals while maintaining a first predefined vacuum level within the first vacuum chamber and maintaining a second predefined vacuum level within the second vacuum chamber.

REFERENCES:
patent: 5105762 (1992-04-01), Wilkinson
patent: 5997963 (1999-12-01), Davison et al.
patent: 6603130 (2003-08-01), Bisschops et al.
patent: 2003/0134574 (2003-07-01), Uziel
patent: 02212624 (1990-08-01), None
patent: 2000067793 (2000-03-01), None

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