Method and apparatus for removing external components from a...

Details Method and apparatus for removing external components from a... Method and apparatus for removing external components from a...

2004-06-22

2009-10-20

Moore, Karla (Department: 1792)

Coating apparatus

Gas or vapor deposition

Chamber seal

Reexamination Certificate

active

07604701

ABSTRACT:
An access assembly for a process chamber, including a wall segment constructed and arranged to access the process chamber, a mounting assembly constructed and arranged to couple the wall segment to the process chamber, and a sealing plate mounted to the process chamber. The sealing plate is constructed and arranged to isolate the wall segment from a volume inside the process chamber.

REFERENCES:
patent: 4809862 (1989-03-01), Canty
patent: 5141125 (1992-08-01), Canty et al.
patent: 6306246 (2001-10-01), Melvin et al.
patent: 6367415 (2002-04-01), Kim et al.
patent: 6390019 (2002-05-01), Grimbergen et al.
patent: 2005/0150455 (2005-07-01), Kobayashi et al.
patent: WO 0113419 (2001-02-01), None
patent: WO 2004/026096 (2004-04-01), None
patent: WO 2004/032177 (2004-04-01), None
patent: WO 2004/032178 (2004-04-01), None

Affiliated with

Also associated with

Rating

Method and apparatus for removing external components from a... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method and apparatus for removing external components from a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method and apparatus for removing external components from a... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4136046