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Megasonic bath

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
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Megasonic bath

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
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Megasonic cleaning apparatus

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent

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Megasonic cleaning apparatus

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent

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Megasonic cleaning apparatus for fabricating semiconductor...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Megasonic cleaning system

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent

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Megasonic probe energy director

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Megasonic transducer assembly

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent

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Megasonic wafer cleaning tank with reflector for improved...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for cleaning filters

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for cooling a resonator of a megasonic...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for manufacturing semiconductor device

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for megasonic cleaning with reflected...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for removal of coatings and oxidation...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for semiconductor wafer cleaning using...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for uniformly applying a multi-phase...

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for wafer cleaning

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and apparatus for wafer cleaning

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate

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Method and device for cleaning a sloping or vertical surface on

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent

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Method of and apparatus for cleaning semiconductor wafers

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
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