Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Reexamination Certificate
2006-05-09
2006-05-09
Kornakov, M. (Department: 1746)
Cleaning and liquid contact with solids
Apparatus
With movable means to cause fluid motion
C134S902000, C134S001000, C134S001300, C366S127000
Reexamination Certificate
active
07040332
ABSTRACT:
A system for cleaning a substrate includes a tank defining an inner cavity between a base and sidewalls extending therefrom. A source of acoustic energy affixed to an outer surface of one of the sidewalls. The tank is configured to decouple a direction associated with the acoustic energy from the source of acoustic energy and direct the acoustic energy toward the substrate.
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Boyd John M.
Redeker Fred C.
Thie William
Treur Randolph E.
Kornakov M.
Lam Research Corporation
Martine Penilla and Gencarella LLP
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