Megasonic cleaning apparatus

Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion

Patent

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Details

310335, 310340, B08B 310

Patent

active

048692786

ABSTRACT:
The transducer array for use in a megasonic cleaning system comprising a flat plate made of quartz or sapphire or boron nitride and a transducer having a conductive flat surface bonded to the flat plate and a conductive surface spaced from the flat plate. In another embodiment the array employs a semi-cylindrical energy transmitter with a transducer attached to the transmitter's flat surface.

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