Megasonic cleaning system

Details Megasonic cleaning system Megasonic cleaning system

1991-11-12

1993-09-28

Coe, Philip R.

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

134 1, 310335, 366127, B08B 312

Patent

active

052479544

ABSTRACT:
Megasonic cleaning system for use in cleaning of electronic or other items such as semiconductor wafers or semiconductor substrates in a wafer carrier. Formed piezoelectric transducers are bonded to a tubular envelope at a low temperature and are excited at a first frequency or a second higher frequency for cleaning of items in a cleaning tank. A novel sealing assembly accommodates tubular envelopes of varying diameters.

REFERENCES:
patent: 2934661 (1960-04-01), Chambers
patent: 3596883 (1971-08-01), Brech
patent: 4998549 (1991-03-01), Bran

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