Cleaning and liquid contact with solids – Apparatus – With movable means to cause fluid motion
Patent
1993-04-05
1994-11-22
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
With movable means to cause fluid motion
134902, 310340, 310346, 29 2535, B08B 310
Patent
active
053659600
ABSTRACT:
A thin-walled rigid tube made of aluminum or other strong material that is a good thermal conductor and a good transmitter of megasonic energy is provided with an external sheath of Teflon to shield the tube from fluids used in cleaning semiconductor wafers. Arcuate transducers are coupled to the interior of the tube and energized with megasonic energy to transmit energy through the tube into fluid surrounding the wafers. A partition in the tube divides the tube into two or more chambers. Nitrogen is conducted through a tube end cap and through the chamber containing the transducers. Cooling water is ducted through the other chamber to conduct heat away from the assembly.
REFERENCES:
patent: 2498737 (1950-02-01), Holden
patent: 2934661 (1960-04-01), Chambers
patent: 3596883 (1971-08-01), Breech
patent: 3700937 (1972-10-01), Rissolo
patent: 3972018 (1976-07-01), Erickson
patent: 4183011 (1980-01-01), Massa
patent: 4543130 (1985-09-01), Shwartzman
patent: 4804007 (1989-02-01), Bran
patent: 4823041 (1989-04-01), Inoue et al.
patent: 4869278 (1989-09-01), Bran
patent: 4998549 (1991-03-01), Bran
patent: 5037481 (1991-08-01), Bran
patent: 5090432 (1992-02-01), Bran
patent: 5247954 (1993-09-01), Grant et al.
Stinson Frankie L.
Verteq, Inc.
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