Megasonic bath

Details Megasonic bath Megasonic bath

1996-12-20

1998-06-09

Stinson, Frankie L.

Cleaning and liquid contact with solids

Apparatus

With movable means to cause fluid motion

134902, B08B 310

Patent

active

057620849

ABSTRACT:
A megasonic bath with horizontal wafer orientation that may be conveniently interfaced with brush scrub systems. The megasonic transducer creates a sonic energy flow in the direction of the wafers. The sonic energy causes cavitation which loosens and displaces particles from the surface of the wafers. Water jets produce a horizontal flow across the wafer surfaces. The horizontal flow created by the water jets keeps the wafer surfaces wet, exposes the surfaces to fresh chemicals, and removes the particles which have been displaced or loosened by the sonic energy.

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