Magnetron for a vault shaped sputtering target having two...
Magnetron for low pressure, full face erosion
Magnetron having continuously variable radial position
Magnetron method and apparatus for producing high density ionic
Magnetron plasma process apparatus
Magnetron reactive bias sputtering method and apparatus
Magnetron reactor for providing a high density, inductively coup
Magnetron source for deposition on large substrates
Magnetron sputter apparatus
Magnetron sputter apparatus and method for forming films by usin
Magnetron sputter cathode assembly
Magnetron sputter coating method and apparatus with rotating mag
Magnetron sputter coating source for both magnetic and non magne
Magnetron sputter device having planar and curved targets
Magnetron sputter device having separate confining magnetic fiel
Magnetron sputter device using the same pole piece for coupling
Magnetron sputter etching system
Magnetron sputter gun target assembly with distributed magnetic
Magnetron sputter ion plating
Magnetron sputter source