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Magnetron for a vault shaped sputtering target having two...

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron for low pressure, full face erosion

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron having continuously variable radial position

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron method and apparatus for producing high density ionic

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Magnetron plasma process apparatus

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron reactive bias sputtering method and apparatus

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
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Magnetron reactor for providing a high density, inductively coup

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron source for deposition on large substrates

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter apparatus

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
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Magnetron sputter apparatus and method for forming films by usin

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputter cathode assembly

Chemistry: electrical and wave energy – Processes and products – Vacuum arc discharge coating
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Magnetron sputter coating method and apparatus with rotating mag

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputter coating source for both magnetic and non magne

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter device having planar and curved targets

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter device having separate confining magnetic fiel

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter device using the same pole piece for coupling

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter etching system

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter gun target assembly with distributed magnetic

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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Magnetron sputter ion plating

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
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Magnetron sputter source

Chemistry: electrical and wave energy – Apparatus – Coating – forming or etching by sputtering
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