Apparatus to manufacture semiconductor

Details Apparatus to manufacture semiconductor Apparatus to manufacture semiconductor

2008-01-15

2008-01-15

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

Having glow discharge electrode gas energizing means

C156S345430, C118S7230AN

Reexamination Certificate

active

07318879

ABSTRACT:
An apparatus to manufacture a semiconductor includes a plasma-limiting device to limit a plasma region in a reaction chamber. The plasma-limiting device includes a first limiting device to limit the plasma region in the reaction chamber to a first plasma region, a second limiting device to limit the plasma region in the reaction chamber to a second plasma region having an area larger than an area of the first plasma region, and a driving device to simultaneously move the first and second limiting devices to vary the plasma region.

REFERENCES:
patent: 6350317 (2002-02-01), Hao et al.
patent: 6527911 (2003-03-01), Yen et al.
patent: 6823815 (2004-11-01), Han et al.
patent: 6910441 (2005-06-01), Jang
patent: 6974523 (2005-12-01), Benzing et al.
patent: 11040553 (1999-02-01), None
patent: 2004-063663 (2004-02-01), None
patent: 2004-072110 (2004-03-01), None
patent: 2004-088051 (2004-03-01), None
patent: 1020030090192 (2003-11-01), None
patent: 1020030093794 (2003-12-01), None

Affiliated with

Also associated with

Rating

Apparatus to manufacture semiconductor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Apparatus to manufacture semiconductor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Apparatus to manufacture semiconductor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2802035