Apparatus including chuck and matching box

Details Apparatus including chuck and matching box Apparatus including chuck and matching box

2006-03-28

2006-03-28

Hassanzadeh, Parviz (Department: 1763)

Adhesive bonding and miscellaneous chemical manufacture

Differential fluid etching apparatus

Having glow discharge electrode gas energizing means

C118S7230ER

Reexamination Certificate

active

07018505

ABSTRACT:
An apparatus of fabricating a semiconductor device includes: a chamber; a radio frequency (RF) power supply supplying an RF power for the chamber; a matching box including a matching unit adjusting an impedance of the RF power; and a chuck penetrating a surface of the chamber, the chuck including a fixing means to fix the matching box to the chuck.

REFERENCES:
patent: 5478429 (1995-12-01), Komino et al.
patent: 5951776 (1999-09-01), Selyutin et al.
patent: 6132575 (2000-10-01), Pandumsoporn et al.
patent: 2004/0050327 (2004-03-01), Johnson et al.
patent: 2005/0011450 (2005-01-01), Higashiura

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