4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Test or calibration structure
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Process and structure for measuring the planarity degree of a di

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent

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Process variation monitor for integrated circuits

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent

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Process via mismatch detecting device

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Reexamination Certificate

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