Micromechanical component and method for manufacturing such...
Micromechanical component and method for producing a...
Micromechanical component and process for the fabrication thereo
Micromechanical component as well as a method for producing...
Micromechanical component having a diaphragm
Micromechanical component having thin-layer encapsulation...
Micromechanical component including function components...
Micromechanical component with a dielectric movable structure, a
Micromechanical component with a switch element as a movable str
Micromechanical component with different doping types so...
Micromechanical component with sealed membrane openings and...
Micromechanical component, method for fabrication and use
Micromechanical device
Micromechanical device and method of manufacture thereof
Micromechanical device and method of manufacture thereof
Micromechanical device and method of manufacturing...
Micromechanical device with an epitaxial layer
Micromechanical device with microfluidic lubricant channel
Micromechanical diaphragm
Micromechanical electronic device