Self-aligned last-metal C4 interconnection layer for Cu...
Self-aligned metal to form contacts to Ge containing...
Self-aligned method for forming contact with zero offset to gate
Self-aligned semiconductor contact structures
Self-aligned semiconductor contact structures
Self-aligned semiconductor interconnect barrier and...
Self-aligned silicide contacts formed from deposited silicon
Self-aligned via structure
Self-aligned wafer or chip structure, and self-aligned...
Self-aligned, integrated circuit contact
Self-aligned, lateral diffusion barrier in metal lines to...
Self-aligning contact and interconnect structure
Self-aligning contact and interconnect structure
Self-aligning vias for semiconductors
Self-assembled nanobump array stuctures and a method to...
Self-assembled sub-nanolayers as interfacial adhesion...
Self-coplanarity bumping shape for flip chip
Self-coplanarity bumping shape for flip chip
Self-encapsulated copper metallization
Self-limiting method of reducing contamination in a contact...