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Optical arrangement for exposure apparatus

X-ray or gamma ray systems or devices – Specific application – Lithography
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Optical axis adjusting mechanism for X-ray lens, X-ray...

X-ray or gamma ray systems or devices – Specific application – Telescope or microscope
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Optical communication link

X-ray or gamma ray systems or devices – Specific application – Computerized tomography
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Optical device for directing x-rays having a plurality of...

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical device for X-ray applications

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical element and projection exposure apparatus employing the

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical element of multilayered thin film for X-rays and neutron

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical element of multilayered thin film for x-rays and neutron

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical element, production method of optical element, optical s

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical exposure method and device formed by the method

X-ray or gamma ray systems or devices – Specific application – Lithography
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Optical measuring device

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
Reexamination Certificate

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Optical member for photolithography and method for...

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical sample X-ray testing apparatus and method for...

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical scheme for high flux low-background two-dimensional...

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical structures and methods for x-ray applications

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical thin film and mirror using the same

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optical unit and associated method

X-ray or gamma ray systems or devices – Specific application – Diffraction – reflection – or scattering analysis
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Optically driven therapeutic radiation source

X-ray or gamma ray systems or devices – Specific application – Absorption
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Optically driven therapeutic radiation source having a...

X-ray or gamma ray systems or devices – Specific application – Absorption
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Optically driven therapeutic radiation source including a...

X-ray or gamma ray systems or devices – Specific application – Absorption
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