Optical element of multilayered thin film for X-rays and neutron

Details Optical element of multilayered thin film for X-rays and neutron Optical element of multilayered thin film for X-rays and neutron

1995-06-07

1997-07-08

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 82, G21K 106

Patent

active

056469764

ABSTRACT:
This invention relates to novel methods of producing flat and curved optical elements with laterally and depth graded multilayer thin films, in particular multilayers of extremely high precision, for use with soft and hard x-rays and neutrons and the optical elements achieved by these methods. In order to improve the performance of an optical element, errors in d spacing and curvature are isolated and subsequently compensated.

REFERENCES:
patent: 4525853 (1985-07-01), Keem et al.
patent: 4698833 (1987-10-01), Keem et al.
patent: 5163078 (1992-11-01), Iketaki
"A Unified Geometric Insight for the Design of Toroidal Reflectors with Multilayered Optical Coatings: Figured X-ray Optics" Proceedings of the International Society of Optical Engineering, vol. 562, Aug. 20-22, 1985 by Gerald Marshall, pp. 114-134.
"A New Method for Achieving Accurate Thickness Control for Uniform and Graded Multilayer Coatings on Large Flat Substrates" in Proceedings of International Society of Optical Engineering, vol. 1742, Jul. 1992, by G. Gutman, J. Keem, K. Parker, J.L. Wood, pp. 373-380.
"Layered Synthetic Microstructures as Optical Elements for the Extreme Ultraviolet and Soft X-Rays", International Journal of Modern Physics B, vol.5, No. 13 (1991) by Chakraborty pp. 2133-2228 no month.
"Monochromatization by multilayered optics on a cylindrical reflector and on an ellipsoidal focusing ring", in Optical Engineering, vol. 25, Aug. 1986, by Gerald F. Marshall, pp. 922-932.

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