Optical element of multilayered thin film for x-rays and neutron

Details Optical element of multilayered thin film for x-rays and neutron Optical element of multilayered thin film for x-rays and neutron

1996-11-22

1998-08-25

Church, Craig E.

X-ray or gamma ray systems or devices

Specific application

Diffraction, reflection, or scattering analysis

378 82, G21K 106

Patent

active

057990565

ABSTRACT:
This invention relates to novel methods of producing flat and curved optical elements with laterally and depth graded multilayer thin films, in particular multilayers of extremely high precision, for use with soft and hard x-rays and neutrons and the optical elements achieved by these methods. In order to improve the performance of an optical element, errors in d spacing and curvature are isolated and subsequently compensated.

REFERENCES:
patent: 4525853 (1985-07-01), Keem et al.

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