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Low dielectric constant material for integrated circuit...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant material, insulating film comprising...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant materials for copper damascene

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric constant plasma polymerized thin film and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant polymers having good adhesion and...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant polyorganosilicon coatings generated...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant polyorganosilicon coatings generated...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant porous films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric constant shallow trench isolation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low dielectric constant shallow trench isolation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low dielectric constant shallow trench isolation

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low dielectric constant silicon dioxide sandwich layer

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Low dielectric constant STI with SOI devices

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low dielectric foam dielectric formed from polymer...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Low dielectric materials and methods for making same

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low doped base spacer for reduction of emitter-base...

Semiconductor device manufacturing: process – Forming bipolar transistor by formation or alteration of... – Forming base region of specified dopant concentration profile
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Low doped layer for nitride-based semiconductor device

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Compound semiconductor
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Low dose super deep source/drain implant

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Low energy dose monitoring of implanter using implanted wafers

Semiconductor device manufacturing: process – With measuring or testing
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Low energy passivation of conductive material in damascene...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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