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Chemical-mechanical polishing slurry and method

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Reexamination Certificate

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Chemical-mechanical polishing system having a bi-material...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Chemical-mechanical-polishing slurry and method for...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Chemical-mechanical-polishing station

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Chemical/mechanical polishing slurry, and chemical...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Chemically and electrically stabilized polymer films

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
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Chemically enhanced anneal for removing trench stress...

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Grooved and refilled with deposited dielectric material
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Chemically enhanced focused ion beam micro-machining of copper

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Chemically enhanced focused ion beam micro-machining of copper

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Chemically preventing copper dendrite formation and growth...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Chemically preventing Cu dendrite formation and growth by...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Chemically preventing Cu dendrite formation and growth by...

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
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Chemically removable Cu CMP slurry abrasive

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Utility Patent

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Chemically removable Cu CMP slurry abrasive

Semiconductor device manufacturing: process – Chemical etching – Combined with the removal of material by nonchemical means
Patent

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Chemically synthesized and assembled electronic devices

Semiconductor device manufacturing: process – Having superconductive component
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Chemistry for chemical vapor deposition of titanium...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Chemistry for chemical vapor deposition of titanium...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Chemistry for chemical vapor deposition of titanium...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Chemistry for etching organic low-k materials

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Chemistry for etching quaternary interface layers on InGaAsP...

Semiconductor device manufacturing: process – Making device or circuit emissive of nonelectrical signal – Compound semiconductor
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