Organosilicon precursors for interlayer dielectric films...
Over-passivation process of forming polymer layer over IC chip
Overlay measurement improvement between damascene metal intercon
Oxide etch stop techniques for uniform damascene trench depth
Oxide plasma etching process with a controlled wineglass shape
Oxide-like seasoning for dielectric low k films
Oxidized barrier layer
Oxidized diffusion barrier surface for the adherence of copper a
Oxygen bridge structures and methods to form oxygen bridge...
Oxygen enhancement of ion metal plasma (IMP) sputter deposited b
Oxygen-free, dry plasma process for polymer removal