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Amorphous carbon absorber/shifter film for attenuated phase...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Amplitude mask and apparatus for manufacturing long period grati

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Amplitude mask for writing long-period gratings

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Angular substrates

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Anti-reflection coating for an EUV mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Antireflection mask for contact hole opening

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Aperture disc and method of making the same

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus and method for compensating critical dimension...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus and method for forming features on a substrate

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus and method for machining conductive structures on subs

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus and method for printing a color filter

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Apparatus and method for printing a color filter

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Apparatus and method to improve the resolution of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus and method to improve the resolution of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus for transferring structures

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus for tuning an attenuating phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Application of high transmittance attenuating phase shifting...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Applying color elements and busbars to a display substrate

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Approach to increase the resolution of dense line/space...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Artwork alignment for decorating machine

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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