Amplitude mask and apparatus for manufacturing long period grati

Details Amplitude mask and apparatus for manufacturing long period grati Amplitude mask and apparatus for manufacturing long period grati

1998-07-21

1999-12-21

Rosasco, S.

Radiation imagery chemistry: process, composition, or product th

Radiation modifying product or process of making

Radiation mask

G03F 900

Patent

active

060047038

ABSTRACT:
An amplitude mask used in a long period grating filter manufacturing apparatus includes a metal substrate having a periodic transmission area having a period for selectively transmitting light and a non-transmission area through which light does not pass; and a piezo-electric transducer located on the non-transmission area of the metal substrate for changing the period of the periodic transmission area. The periodic transmission area is located in the middle of the metal substrate and the piezo-electric transducer is located on opposite sides of the periodic transmission area. Piezo-electric transducers may be located on the non-transmission area to vary the period of the periodic transmission area.

REFERENCES:
patent: 5133990 (1992-07-01), Fleischmann et al.

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