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Subresolution grating for attenuated phase shifting mask...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Subresolution grating for attenuated phase shifting mask...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate coating and semiconductor processing method of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate for a transfer mask, transfer mask, and method of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate for diamond stencil mask and method for forming

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate for photomask, photomask blank and photomask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate for photomask, photomask blank and photomask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate for reticle and method of manufacturing the...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate for the micro-lithography and process of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate for transfer mask and method for manufacturing...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrate having colored layers and method for producing the...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Substrate having light shielding layer

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Substrate provided with bank and substrate provided with...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Screen other than for cathode-ray tube
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Substrate with multilayer film, reflection type mask blank...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Substrates for in particular microlithography

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Suppression of side-lobe printing by shape engineering

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Surface coating method to highlight transparent mask defects

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Symmetrical mask system and method for laser irradiation

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Synthetic quartz glass substrate for photomask and making...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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System and a method for improved crosshatch nanomachining of...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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