Optical spacer method for preventing null formation in phase shi
Optical wavelength division multiplexed...
Optical-mechanical feature fabrication during manufacture of...
Optically controlled imaging phase mask element
Optically semitransmissive film, photomask blank and...
Optically structured filter and process for its production
Optimized alternating phase shifted mask design
Organic bottom antireflective coating for high performance...
Organic pigments in color filters liquid of crystal display
Orthogonally separated phase shifted and unphase shifted mask pa
Overlay measuring pattern, and photomask
Overlay target exposure device utilizing pitch determination...
Overlay target for polarized light lithography
Overlying shifter type phase shift photomask blank, overlying sh
Oxide layer patterned by vapor phase etching
Oxide structure having a finely calibrated thickness