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Amplitude mask and apparatus for manufacturing long period grati

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Amplitude mask for writing long-period gratings

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Angular substrates

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Anti-reflection coating for an EUV mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Antireflection mask for contact hole opening

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Aperture disc and method of making the same

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Apparatus and method for compensating critical dimension...

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Apparatus and method for forming features on a substrate

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Apparatus and method for machining conductive structures on subs

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus and method to improve the resolution of...

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Apparatus and method to improve the resolution of...

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Apparatus for transferring structures

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Apparatus for tuning an attenuating phase shift mask

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Application of high transmittance attenuating phase shifting...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Approach to increase the resolution of dense line/space...

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Artwork alignment for decorating machine

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Artwork master for production of multilayer circuit board

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Assist feature for random, isolated, semi-dense, and other...

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Assist features for contact hole mask patterns

Radiation imagery chemistry: process – composition – or product th – Radiation modifying product or process of making – Radiation mask
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Assist features for use in lithographic projection

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