Amplitude mask and apparatus for manufacturing long period grati
Amplitude mask for writing long-period gratings
Angular substrates
Anti-reflection coating for an EUV mask
Antireflection mask for contact hole opening
Aperture disc and method of making the same
Apparatus and method for compensating critical dimension...
Apparatus and method for forming features on a substrate
Apparatus and method for machining conductive structures on subs
Apparatus and method to improve the resolution of...
Apparatus and method to improve the resolution of...
Apparatus for transferring structures
Apparatus for tuning an attenuating phase shift mask
Application of high transmittance attenuating phase shifting...
Approach to increase the resolution of dense line/space...
Artwork alignment for decorating machine
Artwork master for production of multilayer circuit board
Assist feature for random, isolated, semi-dense, and other...
Assist features for contact hole mask patterns
Assist features for use in lithographic projection